Fundamental Electron Interactions with Plasma Processing Gases

Loucas G. Christophorou and James K. Olthoff and L. G. Christophorou

Fundamental Electron Interactions with Plasma Processing Gases

This volume deals with the basic knowledge and understanding of the fundamental interactions of low-energy electrons with molecules. Recent advances in electron-molecule interaction processes are discussed and a unique up-to-date and comprehensive account of the fundamental interactions of low-energy electrons with molecules of current interest in modern technology, specially the semiconductor industry, is presented. The material provided in this volume will aid scientists and engineers working in many fields of basic and applied science and engineering. The unique and authoritative knowledge, information, and understanding it provides generically underpins advances in plasma, laser, lighting, discharge, environmental, radiation, and other technologies.

Book of the Physics of Atoms and Molecules series

  • ISBN: 0306480379
  • ISBN-13: 9780306480379
  • Authors : Loucas G. Christophorou and James K. Olthoff and L. G. Christophorou
  • Category : Science - Molecular Physics
  • Language : English
  • Format:  Hardcover
  • Publication Date: 3/1/2004
  • Publisher Imprint: Kluwer Academic Publishers
  • Price ($AUD): $420.95

  • Usual Dispatch Time: 7 - 10 days


  • Please note that all prices are in Australian dollars
  • Some titles may be subject to availability